Mass air flow sensor

Details Mass air flow sensor Mass air flow sensor

1991-12-23

1993-08-03

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

338 25, G01F 168

Patent

active

052318788

ABSTRACT:
A micromachined mass air flow sensor comprises a silicon substrate with an air flow opening formed therethrough. One or more silicon members carrying a thin film resistor extend over the air flow opening. The silicon members are thermally isolated from the silicon substrate frame about the air flow opening by thermal isolation zones of porous silicon oxide.

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Ford Motor Company Technical Report No. SR 89-160 Functional Behavior of a Batch-Fabrication Monolithic Silicon Mass Air Flow Sensor, C. H. Stephan, Jan. 23, 1990.
IEEE Publication No. 0018-9383/86/1000-1470.sctn.1.00 "A Monolithic Gas Flow Sensor with Polyimide as Thermal Insulator", Goran N. Stemme, IEEE Transactions on Electron Devices, vol. ED-33, No. 10, Oct. 1986.
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