Maskless optical writer

Details Maskless optical writer Maskless optical writer

2006-01-24

2009-06-16

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07548301

ABSTRACT:
A maskless pattern generating system for use in lithographic processing includes a liquid crystal pixel array. The system generates a light beam and applies a voltage level to each pixel of the pixel array to modulate a polarization state of the light beam so as to create a pattern image. The voltage levels correspond to greyscale levels assigned to the pixels. The system can receive a control signal input based on pattern information that defines the pattern image. The setting of the individual voltage levels can allow the liquid crystal pixel array to act as a phase shift mask, can allow the pattern image to be shifted, and can allow the manipulation of a pattern image edge. This maskless pattern writing system acts as a light valve to control pattern imagery, on a pixel by pixel basis, for the purposes of direct writing patterns.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5721622 (1998-02-01), Venkateswar
patent: 5742362 (1998-04-01), Chikamichi
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 5998069 (1999-12-01), Cutter et al.
patent: 6084656 (2000-07-01), Choi et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6291110 (2001-09-01), Cooper et al.
patent: 6333780 (2001-12-01), Tsukuda
patent: 6356340 (2002-03-01), Spence
patent: 6407766 (2002-06-01), Ramanujan et al.
patent: 6480261 (2002-11-01), Cooper et al.
patent: 6504644 (2003-01-01), Sandstrom
patent: 6544698 (2003-04-01), Fries
patent: 6580490 (2003-06-01), Wong et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6812477 (2004-11-01), Matsunami
patent: 6831768 (2004-12-01), Cebuhar et al.
patent: 6985280 (2006-01-01), Cebuhar et al.
patent: 7012674 (2006-03-01), Sewell
patent: 7023528 (2006-04-01), Hsu et al.
patent: 7095484 (2006-08-01), Fries
patent: 2002/0027647 (2002-03-01), Cooper et al.
patent: 2003/0038931 (2003-02-01), Toyoda et al.
patent: 2003/0122091 (2003-07-01), Almogy
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0145712 (2004-07-01), Bleeker
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0012916 (2005-01-01), Van Der Mast et al.
patent: 0 552 953 (1993-07-01), None
patent: 1 503 245 (2005-02-01), None
patent: 8-97119 (1996-04-01), None
patent: 2002-506236 (2002-02-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 99/45441 (1999-09-01), None
patent: WO 2004/001508 (2003-12-01), None
patent: WO 2004/001508 (2003-12-01), None
Search Report for European Patent Application No. 05 00 0082.7, mailed by the European Patent Office on Dec. 10, 2007, 3 pages.
English abstract of Taiwan Patent Publication No. 554411 B, published Sep. 21, 2003, 1 page.
Search Report and translation of Search Report for Taiwan Patent Application No. 094100282, completed by the Intellectual Property Office (IPO) on Nov. 6, 2007, 2 pages.
Translation of Office Action for Japanese Patent Application No. 2005-006630 mailed Feb. 26, 2008, 3 pgs.
Office Action for Chinese Application No. 200510004345.5 issued May 30, 2008, 8 pgs.
Janssen, P., et al., “Design aspects of a scrolling color LCoS display,” Displays, vol. 23, Issue 3, pp. 99-108, Elsevier Science B.V., Jun. 2002.
“Large-Screen, High-Resolution Projection Displays,” Philips Research Password, Issue 4, pp. 16-19, Jul. 2000.
Search Report for Singapore Patent Application No. 200500026-0, mailed by the Australian Patent Office on Aug. 17, 2005, 3 pages.
Translation of Office Action for Japanese Patent Application No. 2005-006630 mailed Feb. 26, 2008, 3 pgs.

Affiliated with

Also associated with

Rating

Maskless optical writer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Maskless optical writer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Maskless optical writer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4144879