Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1985-04-01
1986-10-07
Pianalto, Bernard D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 35, 427 431, 427 531, 427 541, 427 82, 427252, 427253, 4272557, 427261, 427294, 427304, B05D 306
Patent
active
046159045
ABSTRACT:
A method of growing patterned films on a substrate in a deposition chamber without masking, the method consisting of the following steps: pressurizing the chamber with a fluid medium to form a thin absorption layer on the substrate; evacuating the chamber to remove excess fluid medium; prenucleating portions of the substrate with a focused energy beam; repressurizing the chamber with a fluid medium; and inducing deposition of material from the fluid medium and thereby growing a patterned film with deposition occuring primarily on the prenucleated portions of the substrate.
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Deutsch Thomas F.
Ehrlich Daniel J.
Osgood Richard M.
Schlossberg Howard
Engellenner Thomas J.
Maslow James E.
Massachusetts Institute of Technology
Pianalto Bernard D.
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