Maskless direct exposure system and user interface

Details Maskless direct exposure system and user interface Maskless direct exposure system and user interface

2007-12-11

2007-12-11

Lee, Diane (Department: 2851)

Photocopying

Projection printing and copying cameras

Producing plural rows of pictures on photosensitive paper

C355S053000

Reexamination Certificate

active

10974327

ABSTRACT:
A direct exposure system comprises: a data mask that is a data object including drawing data; and a control mask that is a data object including at least one logical layer in which information about exposure conditions applied according to regions on a substrate is specified, and performs a direct exposure process using integrated data generated by combining the data mask with the control mask.

REFERENCES:
patent: 6544698 (2003-04-01), Fries
patent: 10-112579 (1998-04-01), None

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