Chemistry: electrical and wave energy – Processes and products
Patent
1982-12-27
1983-10-11
Tufariello, T. M.
Chemistry: electrical and wave energy
Processes and products
204 27, C25D 502, C25D 706
Patent
active
044090714
ABSTRACT:
A low conductivity fluid mask in a predetermined fluid state is used as a mask in an electroplating jet system method. Preferred embodiments describe a deionized water mask in the liquid fluid state.
REFERENCES:
patent: 3178305 (1965-04-01), Ward
patent: 4364801 (1982-12-01), Salama
"High-Speed Selective Electroplating with Single Circular Jets", R. C. Alkire et al., Journal of the Electrochemical Society, vol. 129, No. 11, Nov. 1982, pp. 2424-2432.
Dibble Eric P.
Lynch Thomas E.
Bardales Norman R.
International Business Machines - Corporation
Tufariello T. M.
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