Masking apparatus and method of fabricating electronic...

Details Masking apparatus and method of fabricating electronic... Masking apparatus and method of fabricating electronic...

2007-10-26

2011-11-01

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C118S720000, C118S504000, C118S505000, C118S506000, C118S728000, C118S729000, C156S345510, C156S345520, C156S345530, C156S345540, C156S345550

Reexamination Certificate

active

08048228

ABSTRACT:
A masking apparatus includes a mask base body and a mask plate. The mask base body includes at least one spacer plate, and a cavity in which an electronic component can be housed. The mask plate is disposed on an upper surface and/or a lower surface of the mask base body. The mask plate includes a film-forming opening with a shape corresponding to the shape of an external structural body to be formed on an outer surface of the component. The mask plate thus allows a film-forming operation to be selectively performed on the outer surface of the component through the film-forming opening. The cavity includes, in an inner surface thereof, a film-forming groove communicating with the film-forming opening so that the external structural body can be formed at once on an upper surface and/or a lower surface of, and also on a peripheral surface of the component.

REFERENCES:
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