Radiant energy – Radiation controlling means
Patent
1976-06-08
1977-07-19
Smith, Alfred E.
Radiant energy
Radiation controlling means
29579, 96 362, 250514, B01J 1700, G02B 500, G21F 504
Patent
active
040371115
ABSTRACT:
It has been observed that the deposition and patterning of metallic layers on a supported X-ray-transparent film to form a mask for X-ray lithography introduce stresses in the mask structure. In turn these stresses cause distortions of the film and of the high-resolution X-ray-absorptive pattern formed thereon. Various techniques, including new metallization systems, are proposed for minimizing the establishment of stresses in such structures.
REFERENCES:
patent: 3892973 (1975-07-01), Coquin et al.
patent: 3925677 (1975-12-01), Fraser
patent: 3958263 (1976-05-01), Panish et al.
"Spurious Effects Caused by the Continuous Radiation and Ejected Electrons in X-ray Lithography," Jour. Vac. Sci. Technol., vol. 12, No. 6, Nov./Dec. 1975, Maldonado, pp. 1329-1331.
Coquin Gerald Allan
Maldonado Juan Ramon
Maydan Dan
Somekh Sasson Roger
Bell Telephone Laboratories Incorporated
Canepa Lucian C.
Grigsby T. N.
Smith Alfred E.
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