Mask-slice alignment method

Details Mask-slice alignment method Mask-slice alignment method

1980-02-29

1981-09-29

Truhe, J. V.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

250548, 356400, G05B 106

Patent

active

042925762

ABSTRACT:
A method of aligning an x-ray mask to a pattern on a semiconductor slice utilizing an infrared light source and an alignment pattern pair on the mask and slice to automatically and precisely position the x-ray mask on the semiconductor slice.

REFERENCES:
patent: 3544801 (1970-12-01), Dyck
patent: 3569718 (1971-03-01), Borner
patent: 4211489 (1980-07-01), Kleinknecht et al.

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