Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent
1981-02-09
1983-02-15
Smith, John D.
Coating apparatus
Gas or vapor deposition
Having means to expose a portion of a substrate to coating...
118721, 118729, 118504, 427282, C23C 1308
Patent
active
043734707
ABSTRACT:
A carriage assembly for positioning a selected mask from a plurality of masks between a substrate and a source wherein an elongated mask support means having an elongated mask supporting frame and including means for defining elements for guiding and supporting the elongated mask supporting frame, a plurality of apertures formed in the elongated mask supporting frame and which extends from the upper surface to the lower surface and wherein each aperture has a predetermined diameter and a preselected spacing between the centers thereof and which support a plurality of masks therein, a support roller having a bearing surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements; a pair of central guide rollers each of which have an outer grooved recessed receiving surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements and a loaded clamping roller having an outer side wall bearing surface for engaging and dynamically clamping the elongated mask supporting frame and which is in parallel alignment with the axis of the central guide rollers and permits the elongated mask supporting frame to be transported while the guiding and support elements engage the surfaces of the central guide rollers and clamping roller to provide the equivalent of a three point suspension and support system for the elongated mask support means wherein the clamping roller cooperates with the guide rollers to hold the elongated mask support means between the guide rollers and support roller is shown.
REFERENCES:
patent: 3302609 (1967-02-01), Walker et al.
patent: 3703881 (1972-11-01), Ruf et al.
patent: 3747558 (1973-07-01), Harel
patent: 4096821 (1978-06-01), Greeneich et al.
De Palma, "Pico Chip Passive RF Components Inductors-Capacitors-Resistors", r.f. Design, a Cardiff Publication, Jun. 1980, pp. 11-17.
Applied Magnetics Corporation
Meaney, Jr. Daniel J.
Plantz Bernard F.
Smith John D.
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