Mask, mask manufacturing method, film forming method,...

Details Mask, mask manufacturing method, film forming method,... Mask, mask manufacturing method, film forming method,...

2011-03-22

2011-03-22

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

Reexamination Certificate

active

07909932

ABSTRACT:
A mask includes: a base plate having an opening; a chip having an aperture pattern positioned at the opening in the base plate; a plug detachably arranged to the base plate; and a joining member joining the chip and the plug.

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