Mask, mask chip, manufacturing method of mask, manufacturing...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

Reexamination Certificate

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Details

C438S021000, C216S041000

Reexamination Certificate

active

11425396

ABSTRACT:
A mask in which a plurality of mask chips are connected to one another via a supporting member, includes: a plurality of first opening sections that are provided in the plurality of mask chips and that correspond to a pattern to be formed; a cutout section provided at at least one of side faces opposing to each other of the mask chips adjacent to each other; a gap section provided at a connected section connecting the mask chips adjacent to each other, the gap section being composed of the cutout section and including a second opening section corresponding to a pattern to be formed; and a block section that is provided at at least one of the mask chips adjacent to each other and that covers the gap section other than the second opening section.

REFERENCES:
patent: 7045904 (2006-05-01), Odegard et al.
patent: 2003/0129788 (2003-07-01), Asano et al.
patent: 10-8239 (1998-01-01), None
patent: 2001-185350 (2001-07-01), None
patent: 2001-273976 (2001-10-01), None
patent: 2003-67454 (2003-03-01), None
patent: 2003-332056 (2003-11-01), None

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