Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-05-03
2005-05-03
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S053000, C430S005000
Reexamination Certificate
active
06888621
ABSTRACT:
An exposure apparatus for exposing a substrate with an image of a pattern formed on a mask, including an illumination system or irradiation for illuminating or irradiating the mask with exposure light. A projection optical system is included for projecting, onto the substrate, an image of the pattern illuminated by the exposure light. The mask is securely supported on a movable mask stage. In one example, a mask holder is provided for supporting the mask from below. A pressing member is also included for applying, from above, a prescribed force to the mask, outside of the points supported by the mask holder.
REFERENCES:
patent: 3488120 (1970-01-01), Nagel
patent: 4963921 (1990-10-01), Kariya et al.
patent: 5164974 (1992-11-01), Kariya et al.
patent: 5204711 (1993-04-01), Takubo et al.
patent: 5253012 (1993-10-01), Chiba et al.
patent: 5296893 (1994-03-01), Shaw et al.
patent: 5742376 (1998-04-01), Makinouchi
patent: 5825463 (1998-10-01), Hara et al.
patent: 5883703 (1999-03-01), Knirck et al.
patent: 5894056 (1999-04-01), Kakizaki et al.
patent: 6172738 (2001-01-01), Korenaga et al.
Araki Yasuo
Mizutani Shinji
Narushima Hiroaki
Tokuda Noriaki
Yasuda Masahiko
Kim Peter B.
Nikon Corporation
LandOfFree
Mask-holding apparatus for a light exposure apparatus and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Mask-holding apparatus for a light exposure apparatus and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mask-holding apparatus for a light exposure apparatus and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3421948