Mask for sequential lateral solidification (SLS) process and...

Details Mask for sequential lateral solidification (SLS) process and... Mask for sequential lateral solidification (SLS) process and...

2006-06-16

2010-06-22

Booth, Richard A. (Department: 2812)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S022000, C438S166000

Reexamination Certificate

active

07740993

ABSTRACT:
A mask for sequential lateral solidification (SLS) processes including at least one first window, one second window, one third window, and one fourth window is provided. Each window has a length extending longitude on the mask. The second window is aligned to the first window. The width of the first window is greater than that of the second window. The fourth window is aligned to the third window. The width of the third window is greater than that of the fourth window.

REFERENCES:
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patent: 2004/0127066 (2004-07-01), Jung
patent: 2004/0253819 (2004-12-01), You
patent: 2005/0079693 (2005-04-01), Kang et al.
patent: 1586013 (2005-02-01), None
patent: 1638023 (2005-07-01), None

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