Mask for piling process, mask-producing method, and mask-employi

Details Mask for piling process, mask-producing method, and mask-employi Mask for piling process, mask-producing method, and mask-employi

1998-04-24

2000-03-21

Krynski, William

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430 4, 430 6, 428195, 428332, G03F 900

Patent

active

060400943

ABSTRACT:
The present invention mask 1 has a mask-portion 12. The mask-portion 12 comprises: a bed sheet layer 12c made of paper or resin; and an irradiation-resistant layer 12e made of metal and coated on the irradiation side of the bed sheet layer 12c. The irradiation-resistant layer 12e has durability with respect to the emitted energy such as laser beam than the bed sheet layer 12c.

REFERENCES:
patent: 4247508 (1981-01-01), Housholder
patent: 4293624 (1981-10-01), Buckley
patent: 5204055 (1993-04-01), Sachs et al.
patent: 5354414 (1994-10-01), Feygin
patent: 5718279 (1998-02-01), Satoh et al.
English Abstract of Japanese Application 62245785 dated Oct. 1, 1987, Patent Abstracts of Japan.
European Search Report dated May 20, 1999 by Examiner U. Haenisch at The Hague.

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