Mask for laser irradiation, method of manufacturing the...

Details Mask for laser irradiation, method of manufacturing the... Mask for laser irradiation, method of manufacturing the...

2006-11-07

2006-11-07

Rosasco, S. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07132202

ABSTRACT:
A mask for laser irradiation includes a base substrate, a laser beam shielding pattern on a first surface of the base substrate, wherein the laser beam shielding pattern is made of an opaque metallic material and has laser beam transmitting portions spaced apart from each other, and an anti-thermal oxidation layer covering the laser beam shielding pattern, wherein a second surface of the base substrate is an incident surface of a laser beam.

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