Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1981-09-08
1983-08-09
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
355 53, 355 77, 430 22, 430312, G03B 2752, G03B 2732
Patent
active
043975437
ABSTRACT:
The invention relates to a mask for imaging a pattern on a photoresist layer, with at least one alignment mark, to a method of making such a mask, and use of these masks for making semiconductor components.
The masks made in accordance with the invention are obtained in such manner that in their production the patterns of adjacent chip fields are imaged to the effect that they overlap in their border lines containing the alignment marks. The process produces alignment marks representing the mean of at least two alignment marks of adjacent chip fields.
By means of the above specified manufacturing process, the opto-mechanical imaging defects observed during mask production can be substantially eliminated. The masks as disclosed by the invention can be aligned in semiconductor processes with more precision than prior art masks.
REFERENCES:
patent: 3507592 (1970-04-01), McLaughlin
patent: 4094602 (1978-06-01), Holliday
Kolbe Hartmut F.
Schwarzbach Frank A.
Goodwin John J.
International Business Machines - Corporation
Wintercorn Richard A.
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