Mask for depositing thin film of flat panel display and...

Details Mask for depositing thin film of flat panel display and... Mask for depositing thin film of flat panel display and...

2005-11-17

2009-08-11

Huff, Mark F (Department: 1795)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C118S504000, C118S620000, C427S282000, C430S005000

Reexamination Certificate

active

07572338

ABSTRACT:
A mask for depositing a thin film of a flat panel display and a method of fabricating the mask are disclosed. Embodiments of the mask can improve position accuracy and prevent problems caused by thermal expansion of the mask by attaching a reinforcing member and mask pattern units arranged on openings of the reinforcing member using a buffer member. The mask includes a reinforcing member including a plurality of first openings; mask pattern units arranged corresponding to the first openings of the reinforcing member and supported by the reinforcing member; and a buffer member including a plurality of second openings corresponding to the first openings of the reinforcing member, and attaching the reinforcing member to the mask pattern units to support the reinforcing member and the mask pattern units.

REFERENCES:
patent: 2003/0059690 (2003-03-01), Yotsuya
patent: 2003/0101932 (2003-06-01), Kang
patent: 2004/0104197 (2004-06-01), Shigemura et al.
patent: 2004/0109153 (2004-06-01), Vroman et al.
patent: 2004/0115342 (2004-06-01), Shigemura
patent: 2004/0197675 (2004-10-01), Shibata et al.
patent: 2002-055461 (2002-02-01), None
patent: 2002-305080 (2002-10-01), None
patent: 2003-107723 (2003-04-01), None
patent: 2003-308966 (2003-10-01), None
patent: 2003-332057 (2003-11-01), None
patent: 2004-087466 (2004-03-01), None
patent: 2004-169169 (2004-06-01), None
patent: 2004-296436 (2004-10-01), None
patent: 2005-281745 (2005-10-01), None
patent: P2003-0009324 (2003-01-01), None
patent: 1020030046090 (2003-06-01), None
patent: 1020030093959 (2003-12-01), None
Office Action issued by the Japanese Patent Office on Jun. 16, 2009.

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