Mask fabrication supporting method, mask blank providing...

Details Mask fabrication supporting method, mask blank providing... Mask fabrication supporting method, mask blank providing...

2005-03-07

2010-02-09

Whitmore, Stacy A (Department: 2825)

Image analysis

Applications

Manufacturing or product inspection

C382S145000, C716S030000, C716S030000, C430S005000

Reexamination Certificate

active

07660456

ABSTRACT:
A mask blank is provided by forming a plurality of films, including at least a thin film to be a transfer pattern, on a board. At the time of patterning a resist film of the mask blank according to pattern data, film information to check with a pattern is obtained for each of a plurality of the films.

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