Mask blank and mask

Details Mask blank and mask Mask blank and mask

1977-08-04

1979-12-11

Lesmes, George F.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

156656, 156657, 427259, 428210, 428469, 428539, 428332, B32B 1504

Patent

active

041784030

ABSTRACT:
The mask blank is provided with a transparent coating layer interposed between a transparent substrate and a mask metal layer. The transparent coating layer is made of material which is resistant to an etching solution.

REFERENCES:
patent: 3758326 (1973-09-01), Hennings et al.
patent: 3916056 (1975-10-01), Feldstein
patent: 3922420 (1975-11-01), Schnable et al.
patent: 3949131 (1976-04-01), Fraser

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