Mask and projection exposure apparatus

Details Mask and projection exposure apparatus Mask and projection exposure apparatus

2005-03-15

2005-03-15

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

C355S053000, C355S077000, C430S005000

Reexamination Certificate

active

06867845

ABSTRACT:
There is to provide a mask including a transparent member at a side of a surface of a base, a pattern being formed on the surface, and a correction part for correcting a change in an optical path of the transparent member.

REFERENCES:
patent: 5739899 (1998-04-01), Nishi et al.
patent: 6268902 (2001-07-01), Mori
patent: 6522386 (2003-02-01), Nishi
patent: 6545829 (2003-04-01), Boettiger et al.
patent: 6627365 (2003-09-01), Shiraishi
patent: 20010004508 (2001-06-01), Shirasaki
patent: 1158361 (2001-11-01), None
patent: 4-130711 (1992-05-01), None
patent: 7-29803 (1995-01-01), None
patent: 2001-117213 (2001-04-01), None
An English translation of a Notice of Rejection mailed May 27, 2003, for Japanese Application No. 2001-401228; (discussing JP Application No. 2000-49802).

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