Mask and method for modification of a surface

Details Mask and method for modification of a surface Mask and method for modification of a surface

1998-05-04

2000-06-27

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430323, G03F 900

Patent

active

060805137

ABSTRACT:
A surface of a substrate (3) is to be exposed to a medium (11) directed towards said surface and which modifies said surface. A mask (4) to be used therefor has at least one opening (9) through which said medium (11) is allowed to reach said surface. The opening (9) is located in a protrusion (10) of said mask (4) which is directed versus said surface.

REFERENCES:
patent: 4479830 (1984-10-01), Koshino et al.
patent: 5403684 (1995-04-01), Schroeder et al.

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