Mask and device for managing the same

Details Mask and device for managing the same Mask and device for managing the same

1998-11-02

2000-06-20

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

G03F 900

Patent

active

060776323

ABSTRACT:
The present invention provides a mask and mask managing device which is capable of managing precisely much information required for the mask. The mask of the present invention includes an IC to/from which information relating to the mask can be written/read out, and a plurality of signal lines which are respectively connected to electrodes of the memory. The memory is connected to a mask information reading/writing unit through the signal lines in order to carry out read and write of the mask information.

REFERENCES:
patent: 4343877 (1982-08-01), Chiang

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