Mask and design method thereof

Details Mask and design method thereof Mask and design method thereof

2011-04-05

2011-04-05

Rosasco, Stephen (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07919216

ABSTRACT:
A mask and the design method thereof are provided. The mask includes a light-shielding area shielding off a light, wherein the light-shielding area includes a photonic crystal having a lattice constant, and a ratio of the lattice constant to a wavelength of the light is a specific value within a band gap of the photonic crystal.

REFERENCES:
patent: 2006/0006485 (2006-01-01), Mouli
patent: 2006/0029349 (2006-02-01), Hoshi et al.
patent: 2006/0210888 (2006-09-01), Taniguchi
patent: 2007/0025682 (2007-02-01), Takagi et al.

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