Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1991-04-18
1994-03-22
Rosenberger, Richard A.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
356400, 356399, G01B 1100
Patent
active
052969169
ABSTRACT:
An apparatus and method for aligning an irregularly shaped object with a contact mask is disclosed. The apparatus includes a means for holding the irregularly shaped object, a means for holding a contact mask, a means for keeping the object and contact mask apart during alignment, means for optically aligning the contact mask to the object, and a means to bring the cube and object together once aligned. A conventional mask alignment tool has been modified to support a clamping fixture which holds the object in a fixed position. It includes a wafer sized disk made of deformable material which permits the edges of the disk to be in contact with the mask, yet when deflected by vacuum pressure will keep the surface of the object away from the contact mask assembly. Upon proper alignment, the vacuum is released and the deformable disk allows the object to cone in contact with the contact mask. In the method of the invention, the process steps include holding an object and contact mask in a spaced relationship from each other, optically aligning the object and contact mask through the holes in the contact mask, and bringing the object and contact mask together once aligned.
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Kelly Howard L.
Kolan Hans
Perlman David
Abzug Jesse L.
Bruzzone Lauren C.
Hantis K. P.
International Business Machines Corp.
Rosenberger Richard A.
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