Mask aligner having a malfunction disposal device

Details Mask aligner having a malfunction disposal device Mask aligner having a malfunction disposal device

1983-11-23

1985-11-19

Adams, Russell E.

Photocopying

Projection printing and copying cameras

Step and repeat

355 86, 355 95, 364184, 364490, G03B 2742

Patent

active

045538344

ABSTRACT:
A mask aligner for aligning a wafer with a mask and exposing the wafer to an image of the mask, includes an illumination source for illuminating the mask, plural devices for executing plural functions of the aligner, a controller for controlling operation of the apparatus in accordance with a predetermined routine, a detector for automatically detecting a malfunction, a memory of plural routines for disposing of one kind of malfunction; a selector for manually selecting one of the routines; and another controller for controlling the apparatus in accordance with the selected routine, when the detector detects a malfunction.

REFERENCES:
patent: 3955072 (1976-05-01), Johannsmeir et al.
patent: 4199219 (1981-02-01), Suzki et al.
patent: 4251129 (1981-02-01), Suzki et al.
patent: 4340965 (1982-07-01), Beckman et al.
patent: 4425037 (1984-01-01), Hershel et al.

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