Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1985-07-19
1986-08-26
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156647, 156653, 156657, 156662, C23F 102, H01L 21306, B44C 122, C03C 1500
Patent
active
046081127
ABSTRACT:
A novel method and device for accurately aligning a substrate comprising a silicon wafer in the fabrication of a silicon vertical junction solar cell are described which comprise a base plate having a recess therein defining an opening for snugly receiving the wafer, the recess including a substantially straight portion for mating with a cleaved edge of known crystallographic orientation provided on the wafer, and a mask plate for covering the base plate and wafer, the mask including a pattern in predetermined configuration through which the wafer may be exposed in the fabrication process for the solar cell.
REFERENCES:
patent: 2970896 (1961-02-01), Cornelison et al.
patent: 3461566 (1969-08-01), Gerstner
patent: 3615474 (1971-10-01), Rosenberger
patent: 3685117 (1972-08-01), Wing
patent: 3690953 (1972-09-01), Wise
patent: 3963489 (1976-06-01), Cho
patent: 3985579 (1976-10-01), Rahilly
patent: 4330932 (1982-05-01), Morris et al.
patent: 4377627 (1983-03-01), Vinton
patent: 4409423 (1983-10-01), Holt
patent: 4414749 (1983-11-01), Johannsmeier
patent: 4418467 (1983-12-01), Iwai
patent: 4420650 (1983-12-01), Wise et al.
patent: 4473455 (1984-09-01), Dean et al.
Powell William A.
Scearce Bobby D.
Singer Donald J.
The United States of America as represented by the Secretary of
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