Mars optical modulators

Details Mars optical modulators Mars optical modulators

1998-07-30

1999-09-07

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359223, 359224, 359290, 359295, 359318, 430321, G02B 2608

Patent

active

059495715

ABSTRACT:
The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which shorting between the lower poly metallization and the silicon substrate is prevented by providing an insulating layer on the surface of the silicon substrate.

REFERENCES:
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5589974 (1996-12-01), Goosen et al.
patent: 5701193 (1997-12-01), Vogel et al.
patent: 5739945 (1998-04-01), Tayebati
patent: 5825528 (1998-10-01), Goossen

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