Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1998-07-30
1999-09-07
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359223, 359224, 359290, 359295, 359318, 430321, G02B 2608
Patent
active
059495715
ABSTRACT:
The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which shorting between the lower poly metallization and the silicon substrate is prevented by providing an insulating layer on the surface of the silicon substrate.
REFERENCES:
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5589974 (1996-12-01), Goosen et al.
patent: 5701193 (1997-12-01), Vogel et al.
patent: 5739945 (1998-04-01), Tayebati
patent: 5825528 (1998-10-01), Goossen
Goossen Keith Wayne
Walker James Albert
Burke Margaret
Epps Georgia
Lucent Technologies
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