Marking apparatus used in a process for producing...

Details Marking apparatus used in a process for producing... Marking apparatus used in a process for producing...

2007-06-26

2009-11-10

Kiknadze, Irakli (Department: 2882)

X-ray or gamma ray systems or devices

Accessory

Alignment

C378S034000, C378S163000

Reexamination Certificate

active

07614787

ABSTRACT:
X-rays are irradiated at the board5from the X-ray generator11,the image of the standard marks50, 51are projected on the fluorescence screen12,the resulted image is photographed simultaneously by one shot of the visible light CCD camera13and finally processed by the control device9to simultaneously determine the position of the standard marks50and51.the alignment marks depicted on the photo masks24and25are imprinted on the dry film resist layers55respectively based on the positions of the standard marks50and51by irradiating X-rays through the sets of mirrors22, 23on the dry film resist layers55.

REFERENCES:
patent: 4642160 (1987-02-01), Burgess
patent: 6381005 (2002-04-01), Kasumi et al.
patent: 6597757 (2003-07-01), Ida et al.
patent: 6609297 (2003-08-01), Hiramatsu et al.
patent: 7178229 (2007-02-01), Borland et al.
patent: 2003/0081719 (2003-05-01), Ida et al.
patent: 2003-131401 (2003-05-01), None

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