Mark position measuring method and apparatus

Details Mark position measuring method and apparatus Mark position measuring method and apparatus

2007-10-02

2008-11-18

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

Reexamination Certificate

active

07453570

ABSTRACT:
A method of measuring a position of a mark in a chamber, a pressure inside the chamber being different from a pressure outside the chamber. The method includes a first detection step of illuminating a reference mark fixedly disposed in the chamber using a first illuminator disposed inside the chamber, and detecting the reference mark using a detector disposed outside the chamber. The method also includes a second detection step of illuminating a mark, which is movable with respect to the reference mark in the chamber, using a second illuminator disposed inside the chamber, and detecting the mark using the detector. The method further includes a calculation step of calculating a position of the mark with respect to the reference mark based on detection results of the first and second detection steps.

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Japanese Office Action dated Aug. 25, 2008, issued in corresponding Japanese patent application No. 2003-289156.

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