Mark position measuring method and apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Reexamination Certificate

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Reexamination Certificate

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07453570

ABSTRACT:
A method of measuring a position of a mark in a chamber, a pressure inside the chamber being different from a pressure outside the chamber. The method includes a first detection step of illuminating a reference mark fixedly disposed in the chamber using a first illuminator disposed inside the chamber, and detecting the reference mark using a detector disposed outside the chamber. The method also includes a second detection step of illuminating a mark, which is movable with respect to the reference mark in the chamber, using a second illuminator disposed inside the chamber, and detecting the mark using the detector. The method further includes a calculation step of calculating a position of the mark with respect to the reference mark based on detection results of the first and second detection steps.

REFERENCES:
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patent: 5671057 (1997-09-01), Kawai
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patent: 6774374 (2004-08-01), Driessen et al.
patent: 7126689 (2006-10-01), Nishi
patent: 2001/0006413 (2001-07-01), Burghoorn
patent: 2001/0046037 (2001-11-01), Ota et al.
patent: 2002/0196421 (2002-12-01), Tanaka et al.
patent: 2003/0095241 (2003-05-01), Burghoorn
patent: 2005/0030537 (2005-02-01), Hayashi et al.
patent: 5-198471 (1993-08-01), None
patent: 2001-217191 (2001-08-01), None
Japanese Office Action dated Aug. 25, 2008, issued in corresponding Japanese patent application No. 2003-289156.

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