Mark position measuring method and apparatus

Details Mark position measuring method and apparatus Mark position measuring method and apparatus

2007-12-18

2007-12-18

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

Reexamination Certificate

active

10912100

ABSTRACT:
A method of measuring a position of a mark in a chamber in which a pressure inside the chamber is different from a pressure outside the chamber. The method includes a first detection step of detecting a reference mark fixedly disposed in the chamber, through a window arranged on the chamber, using a detector disposed outside the chamber, a second detection step of detecting the mark movable with respect to the reference mark in the chamber through the window using the detector, and a calculation step of calculating a position of the mark with respect to the reference mark based on detection results of the first and second detection steps, so as to suppress a detection error caused by at least one of deformations of the chamber and the window, in which at least one deformation is due to a difference between the pressure inside the chamber and the pressure outside the chamber.

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