Mark position detection system for use in charged particle beam

Details Mark position detection system for use in charged particle beam Mark position detection system for use in charged particle beam

1987-06-17

1989-02-28

Fields, Carolyn E.

Radiant energy

Means to align or position an object relative to a source or...

250310, G01N 2322

Patent

active

048088293

ABSTRACT:
A mark position detection system used in a charged particle beam apparatus and including detection circuit for detecting a reflected electron generated at a mark when the mark is scanned with a charged particle beam, to obtain a mark signal, and signal processing circuit for comparing the mark signal from the detection circuit with a predetermined threshold level to find the position of the charged particle beam at a time the mark signal traverses the threshold level, thereby detecting the position of a mark edge, is disclosed in which, when the mark signal traverses the threshold level and has a peak value exceeding a predetermined value, it is determined by the signal processing circuit that the position of the charged particle beam at a time point at which the mark signal traverses the threshold level is the position of the mark.

REFERENCES:
patent: 4286154 (1981-08-01), Okubo et al.

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