Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-03-27
2007-03-27
Miriam, Daniel (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S151000
Reexamination Certificate
active
10461443
ABSTRACT:
A mark position detection apparatus includes: an illumination unit that illuminates a substrate having a mark formed thereupon; an image-capturing unit that captures an image of the substrate by using reflected light from the substrate and outputs image signals; a storage unit at which information related to fixed pattern noise contained in the image signals output by the image-capturing unit is stored in memory; and a control unit that calculates a position of the mark on the substrate based upon the information related to the fixed pattern noise stored in memory at the storage unit and the image signals output from the image-capturing unit.
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Arima Hirofumi
Fukui Tatsuo
Yamada Tomoaki
Miriam Daniel
Nikon Corporation
Oliff & Berridg,e PLC
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