mark position detecting apparatus

Details mark position detecting apparatus mark position detecting apparatus

2005-12-13

2005-12-13

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S400000, C356S620000

Reexamination Certificate

active

06975399

ABSTRACT:
A mark position detecting apparatus includes: an illuminating unit that illuminates a mark on a substrate; an image forming optical system that forms an image of the mark with light from the mark; an adjustment unit that adjusts distortion manifesting at the image forming optical system; an image capturing unit that captures the image of the mark formed by the image forming optical system in which the distortion has been adjusted and outputs image signals; and a calculation unit that calculates a substantial central position of the mark based upon the image signals output by the image capturing unit.

REFERENCES:
patent: 5617211 (1997-04-01), Nara et al.
patent: 5754299 (1998-05-01), Sugaya et al.
patent: 6140654 (2000-10-01), Nakasugi et al.
patent: 6456377 (2002-09-01), Suzuki et al.
patent: 6563573 (2003-05-01), Morohoshi et al.
patent: 2002/0060793 (2002-05-01), Fukui
patent: A 2000-077295 (2000-03-01), None
patent: A 2000-349014 (2000-12-01), None

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