Data processing: measuring – calibrating – or testing – Measurement system
Reexamination Certificate
2005-02-15
2005-02-15
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
C702S150000, C356S237400, C356S237500, C356S508000, C356S509000, C356S401000, C382S151000
Reexamination Certificate
active
06856931
ABSTRACT:
In view of a specific area having a characteristic surface state in a mark-formed area or a surrounding area thereof, an area calculation unit has a window having a dimension corresponding to the specific area scan the whole measurement area in order to obtain a quantity representing a surface state based on measured signals through the window, and then, by identifying a measured signal area corresponding to the specific area based on the quantity as a function of the window's position, extracts a measured signal area corresponding to the mark. And a position calculation unit performs computation such as pattern-matching on the signal area extracted, thereby detecting the position of the mark accurately and quickly.
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Barlow John
Dougherty Anthony T.
Nikon Corporation
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