Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-05-09
2006-05-09
Patel, Ramesh (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S059000, C700S060000, C700S062000, C700S070000, C700S178000, C700S192000, C700S247000, C702S010000, C382S285000, C359S470000, C359S471000, C346S07700R
Reexamination Certificate
active
07043335
ABSTRACT:
A regression mirror reflects light from a light projector in a reflecting direction opposite an incident direction. A light receiver combined with the light projector in a unitary unit receives the reflected light from the regression mirror. A detecting unit including an optical sensing unit having the light projector, the light receiver and the reflecting member is disposed so that a wafer is disposed in a moving path along which an optical path of the optical sensing unit moves relative to the wafer. An information-acquiring unit acquires position information of the detecting unit relative to the wafer, an arithmetic unit calculates mapping information about an arrangement of the wafer based on the position information and light-reception information provided by the light receiver.
REFERENCES:
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4939439 (1990-07-01), Dalglish
patent: 5225691 (1993-07-01), Powers et al.
patent: 5406367 (1995-04-01), Sopori
patent: 5418382 (1995-05-01), Blackwood et al.
patent: 5783834 (1998-07-01), Shatas
patent: 6053983 (2000-04-01), Saeki et al.
patent: 6650409 (2003-11-01), Noguchi et al.
patent: 6876438 (2005-04-01), Tokita
patent: 2005/0111727 (2005-05-01), Emery
patent: 0 674 340 (1995-09-01), None
patent: 001471565 (2004-10-01), None
patent: A-4-236448 (1992-08-01), None
patent: A-10-135306 (1998-05-01), None
patent: A-10-175734 (1998-06-01), None
patent: A-2000-036528 (2000-02-01), None
patent: A 2000-124289 (2000-04-01), None
patent: WO 99/02996 (1999-01-01), None
patent: A-11-163080 (1999-06-01), None
patent: WO 2004-001816 (2003-12-01), None
Goto Hirohiko
Yoshida Tetsuya
Kawasaki Jukogyo Kabushiki Kaisha
Patel Ramesh
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