Manufacturing process of a magnetic head, magnetic head,...

Details Manufacturing process of a magnetic head, magnetic head,... Manufacturing process of a magnetic head, magnetic head,...

2007-07-17

2007-07-17

Alanko, Anita (Department: 1765)

Etching a substrate: processes

Forming or treating article containing magnetically...

C216S040000, C216S041000, C216S047000, C216S049000, C216S051000, C216S067000, C216S072000, C216S079000

Reexamination Certificate

active

10397832

ABSTRACT:
A manufacturing method of a magnetic head includes a process for forming a lift-off mask pattern on a magnetoresistance effect element, such that the upper part of the lift-off mask pattern is larger in size than the lower part, a process for forming a couple of electrodes on the magnetoresistance effect element using the lift-off mask pattern as a mask, and a process for removing the lift-off mask pattern. The process for forming the lift-off mask pattern is performed according to a dry etching process.

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JPO Office Action dated Sep. 21, 2004.
Japanese Office Action mailed Mar. 27, 2007, Application No. 2003-078720.

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