Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Reexamination Certificate
2007-03-27
2007-03-27
Meeks, Timothy (Department: 1762)
Coating processes
Direct application of electrical, magnetic, wave, or...
Chemical vapor deposition
C427S069000, C427S255600, C414S800000
Reexamination Certificate
active
10356722
ABSTRACT:
A manufacturing system capable of enhancing reliability and luminance of a light emitting element is provided which uses an EL material of very high purity in evaporation. The system is also capable of using an EL material efficiently. Instead of a glass jar, a container (first container11a) to be set in an evaporation apparatus is employed and a material maker (18) stores an EL material (12), or refines it by sublimation and stores, directly in the container. The container is then transferred to a light emitting device maker (19) for evaporation. With a manufacturing system as such, impurities are prevented from contaminating a highly pure EL material. This system also eliminates the trouble of transferring an EL material from a glass jar to a container. The container may be recovered by the material maker and the EL material remaining in the container may be collected for reuse by the manufacturing system.
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Kuwabara Hideaki
Murakami Masakazu
Ohtani Hisashi
Yamazaki Shunpei
Costellia Jeffrey L.
Meeks Timothy
Nixon & Peabody LLP
Semiconductor Energy laboratory Co., Ltd.
Turocy David
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