Manufacturing process for semiconductor device

Details Manufacturing process for semiconductor device Manufacturing process for semiconductor device

1992-02-11

1994-07-12

Kunemund, Robert

Fishing, trapping, and vermin destroying

437238, H01L 2131

Patent

active

053288718

ABSTRACT:
A manufacturing process for a semiconductor device comprising the following steps: to spin-coat by Spin-on method a solution for forming a SOG film on a wafer having a device formed on the surface to form a coating of the SOG film forming solute thereon; to treat by a liquid which is able to dissolve the solute for forming SOG film at least a part of the wafer which is held by claws of a dry etching system at a later stage in the series of processes, thereby removing a coating of the SOG film forming solute at that part; and to then bake the wafer to complete a SOG film.

REFERENCES:
patent: 4683024 (1987-07-01), Miller et al.
patent: 4732785 (1988-03-01), Brewer
patent: 4826709 (1989-05-01), Ryan et al.
patent: 4885262 (1989-12-01), Ting et al.
patent: 4906592 (1990-03-01), Merenda et al.
patent: 5003062 (1991-03-01), Yen
patent: 5106787 (1992-04-01), Yen

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