Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-05-29
2007-05-29
Paladini, Albert W. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C702S035000
Reexamination Certificate
active
10954699
ABSTRACT:
A manufacturing procedure control method. The method executes tests during transport for object lots. The object lots are carried on a transport vehicle during transport. The object lots that pass the tests are loaded in a manufacturing tool. If a load port and a tag reader are provided on the transport vehicle, additional tests can be performed during transport of the object lots.
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Taiwan Office Action mailed Oct. 24, 2006.
Paladini Albert W.
Taiwan Semiconductor Manufacturing Co. Ltd.
Thomas Kayden Horstemeyer & Risley
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