Manufacturing of high density intermetallic sputter targets

Details Manufacturing of high density intermetallic sputter targets Manufacturing of high density intermetallic sputter targets

1999-08-03

2000-03-28

Jenkins, Daniel J.

Powder metallurgy processes

Powder metallurgy processes with heating or sintering

Making composite or hollow article

419 48, 419 54, B22F 312, B22F 704

Patent

active

060427779

ABSTRACT:
There is provided a method for fabricating intermetallic sputter targets of two or more elements in which a mixture of two or more elemental powders are blended and synthesized within a pressing apparatus at a temperature below the melting point of the lowest melting point element in the mixture, followed by heating the synthesized intermetallic powder in the pressing apparatus to a temperature below the melting point of the intermetallic structure while simultaneously applying pressure to the powder to achieve a final density greater than 90% of theoretical density. The powder metallurgy technique of the present invention provides a better microstructure than cast structures, and avoids contamination of the sputter target by eliminating the crushing step of synthesized intermetallic chunks necessitated by separate steps of synthesizing and pressing.

REFERENCES:
patent: 4752335 (1988-06-01), Korb
patent: 5342571 (1994-08-01), Dittmar et al.

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