Metal working – Piezoelectric device making
Reexamination Certificate
2008-03-18
2008-03-18
Till, Terrence (Department: 4175)
Metal working
Piezoelectric device making
C029S622000, C029S623000, C310S332000
Reexamination Certificate
active
07343655
ABSTRACT:
A method of fabricating a micro electromechanical switch on a substrate comprising piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.
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HRL Laboratories LLC
Ladas & Parry
Till Terrence
Zilberman Jossef
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