Glass manufacturing – Processes – With shaping of particulate material and subsequent fusing...
Patent
1999-03-11
2000-08-01
Vincent, Sean
Glass manufacturing
Processes
With shaping of particulate material and subsequent fusing...
65 172, 65421, 261128, 261135, C03B 2000
Patent
active
060949406
ABSTRACT:
A method of manufacturing synthetic silica glass includes the steps of pressurizing a liquid storage tank including a liquid silicon compound therein, generating bubbles in the liquid silicon compound using a foamer, removing the bubbles using a degasser, displacing the liquid silicon compound into a vaporizer while controlling an amount of the liquid silicon compound displaced by a liquid mass flow meter, mixing the displaced liquid silicon compound with a carrier gas to generate a gaseous silicon compound, injecting the gaseous silicon compound into a synthesis furnace, and forming synthetic silica glass by hydrolyzing the gaseous silicon compound in the synthesis furnace.
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Fujiwara Seishi
Jinbo Hiroki
Komine Norio
Suwa Toshitsugu
Nikon Corporation
Vincent Sean
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