Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-11-29
2008-12-02
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
07460220
ABSTRACT:
A method of inspecting a specimen, including: emitting a light from a lamp of a light source; illuminating a specimen on which plural patterns are formed with the light emitted from the light source and, passed through an objective lens; forming an optical image of the specimen by collecting light reflected from the specimen by the illuminating and passed through the objective lens and a image forming lens; detecting the optical image with a TDI image sensor; and processing a signal outputted from the TDI image sensor and detecting a defect of a pattern among the plural patterns formed on the specimen, wherein the image detected by the TDI image sensor is formed with light having a wavelength selected from the wavelengths of the light emitted from the light source.
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Kubota Hitoshi
Maeda Shunji
Nakayama Yasuhiko
Oka Kenji
Yoshida Minoru
Antonelli, Terry Stout & Kraus, LLP.
Pham Hoa Q
Renesas Technology Corporation
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