Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2004-10-26
2008-03-18
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S051000, C700S121000, C702S183000, C707S793000
Reexamination Certificate
active
07346412
ABSTRACT:
The invention intends to provide a manufacturing method of a semiconductor integrated circuit device, which can detect an off-specification faulty wafer in real time. An abnormality detection server stores apparatus log data outputted from semiconductor manufacturing apparatus that processes a semiconductor wafer in an apparatus log data memory. Thereafter, in a lot end signal receiver, when a lot end signal outputted from the semiconductor manufacturing apparatus is received, an abnormal data detector, after referencing an abnormality detection condition setting file stored in a first detection condition memory, based on the referenced content, judges whether there are abnormal data in the apparatus log data stored in the apparatus log data memory or not. Upon detecting an abnormality, a detection result is outputted to an engineer PC and an operator terminal unit.
REFERENCES:
patent: 5923553 (1999-07-01), Yi
patent: 6947801 (2005-09-01), Lin et al.
patent: 2002/0055194 (2002-05-01), Takanabe
patent: 09-129554 (1997-05-01), None
patent: 09-180976 (1997-07-01), None
patent: 10-275753 (1998-10-01), None
patent: 2000-269108 (2000-09-01), None
patent: 2002-149222 (2002-05-01), None
patent: 2002-515650 (2002-05-01), None
patent: WO 99/59200 (1999-11-01), None
International Search Report, for Application No. PCT/JP2004/015835, mailed Dec. 14, 2004.
Chinese Official Action dated Jul. 27, 2007, for Application No. 200480033020.3.
Fukayama Yoshio
Miyamoto Yoshiyuki
Nakajima Toshihiro
Tokorozuki Kazuyuki
Antonelli, Terry Stout & Kraus, LLP.
Picard Leo
Renesas Technology Corp.
Shechtman Sean
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