Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material with...
Reexamination Certificate
2007-02-28
2008-11-25
Chaudhari, Chandra (Department: 2891)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Non-single crystal, or recrystallized, material with...
C257S072000, C257SE27112
Reexamination Certificate
active
07456428
ABSTRACT:
A semiconductor thin film is manufactured by scanning laser light or a substrate onto an arbitrary region of the semiconductor thin film and irradiating a laser thereon. The semiconductor thin film is formed by the substantially belt-shaped crystal being crystallized such that crystalline grains grow in the scanning direction, on the substrate, on XY coordinates where value x of beam size W (μm) of the laser light measured in substantially the same direction as the scanning direction is defined as X axis, and where value y of scanning velocity Vs (m/s) is defined as Y axis, the crystallization processing is performed within a region where all of the following conditions hold: condition 1: the beam size W is larger than wavelength of the laser beam, condition 2: the scanning velocity Vs is smaller than upper-limit of crystal growth speed, and condition 3: x×(1/y)<25 μs.
REFERENCES:
patent: 4514895 (1985-05-01), Nishimura
patent: 5432122 (1995-07-01), Chae
patent: 6072194 (2000-06-01), Wakita et al.
patent: 6391690 (2002-05-01), Miyasaka
patent: 7109069 (2006-09-01), Kokubo et al.
patent: 2003-086505 (2003-03-01), None
patent: 2003-124136 (2003-04-01), None
Hatano Mutsuko
Hongo Mikio
Noda Takeshi
Tai Mitsuharu
Takasaki Yukio
Chaudhari Chandra
Hitachi Displays Ltd.
Mattingly ,Stanger ,Malur & Brundidge, P.C.
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