Manufacturing method of semiconductor devices utilizing alignmen

Details Manufacturing method of semiconductor devices utilizing alignmen Manufacturing method of semiconductor devices utilizing alignmen

1998-04-24

1999-11-02

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

430 30, G03F 900

Patent

active

059767375

ABSTRACT:
An alignment sensor measures the distortion of a bed shot, and a processing section compares the measured distortion with a plurality of distortions of the current stage shots stored in a memory device in advance to select the most appropriate current stage shot. According to the selected result, a drive control section drives and rotates the motor, changes the relative angle between the projector lens and the reticle to execute exposure process. This provides, in manufacture of semiconductor devices using a plurality of projection aligners, projection aligners and a method of manufacturing semiconductor devices capable of removing limitations on the number of projection aligners and achieving a high throughput in manufacture.

REFERENCES:
patent: 5783341 (1998-07-01), Uzawa
patent: 5792580 (1998-08-01), Tomimata
patent: 5856054 (1999-01-01), Tomimata

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