Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate
2006-10-27
2010-06-01
Chen, Jack (Department: 2893)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
C438S107000, C438S113000, C438S459000, C438S460000
Reexamination Certificate
active
07727857
ABSTRACT:
To provide a thin semiconductor device having flexibility. A groove is formed in one surface of a substrate; an element layer including an element is formed, the element being disposed within the groove; the substrate is thinned from the other surface of the substrate until one surface of the element layer is exposed, to form a layer which is to be transposed, having the element; and the layer to be transposed is transposed onto the film.
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Chen Jack
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co. Ltd
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