Manufacturing method of piezoelectric vibrator unit,...

Metal working – Piezoelectric device making

Reexamination Certificate

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C029S407050, C029S407070, C310S311000

Reexamination Certificate

active

07725995

ABSTRACT:
Common internal electrodes27and segment internal electrodes28are laminated alternately with a piezoelectric material29between and a common external electrode30and a segment external electrode31are provided on the surface, forming a drive vibrator24. A free end part24aof the drive vibrator24is formed with an active region L and can be expanded and contracted in the length direction of the vibrator. A piezoelectric material29of the outermost layer in the free end part24acan be operated based on the potential difference between the external and internal electrodes and a portion of the active region L in the external electrode is used as a trimming portion with an effective length x varied by trimming.

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