Manufacturing method of pattern formed body

Radiation imagery chemistry: process – composition – or product th – Effecting frontal radiation modification during exposure,...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C134S001000

Reexamination Certificate

active

11527031

ABSTRACT:
A main object of the present invention is to provide a manufacturing method of a plurality of pattern formed bodies which makes it possible that even if the pattern formed bodies are continuously manufactured, their property varied patterns are each made into a target pattern form with high precision. To achieve the object, the invention provides a manufacturing method of a plurality of pattern formed bodies, comprising a pattern forming step and a foreign matter removing step, wherein the pattern forming step is a step of radiating vacuum-ultraviolet light through a photomask to a pattern forming substrate, varying a surface property by the vacuum-ultraviolet light, and forming a property varied pattern with the property varied on a surface of the pattern forming substrate to form a pattern formed body; the pattern forming step is repeated plural times to manufacture a plurality of the pattern formed bodies; and the foreign matter removing step is a step performed between the repeated pattern forming steps and of radiating vacuum-ultraviolet light from the same light source as used in the pattern forming step to the photomask, in a state where the photomask and the pattern forming substrate are not opposed to each other, to remove a foreign matter deposited onto the photomask.

REFERENCES:
patent: 2001/0026355 (2001-10-01), Aoki et al.
patent: 2001-324816 (2001-11-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Manufacturing method of pattern formed body does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacturing method of pattern formed body, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method of pattern formed body will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3903536

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.