Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent
1995-11-28
1998-05-19
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
117107, 438918, C30B 1514
Patent
active
057530394
ABSTRACT:
An object formed of a semiconductor is heated to and kept at such a temperature that a semiconductor crystal formed of a II-VI Group compound semiconductor mainly containing Zn and Se can be grown. A molecular beam including elements constituting the II-VI Group compound semiconductor mainly containing Zn and Se is irradiated onto the heated object, and a gas beam composed of a nitrogen molecule being in a ground electronic state and having a gas pressure of not less than 3.times.10.sup.-5 Torr, to form a p-type semiconductor crystal on the object.
REFERENCES:
patent: 4904618 (1990-02-01), Neumark
patent: 5468678 (1995-11-01), Nakamura et al.
patent: 5616778 (1997-04-01), Toda et al.
Journal of Crystal Growth 111 (1991) 797-801.
J. Appl. Phys. 58 (2), 15 Jul. 1985.
Doping of Nitrogen Acceptors into ZnSe Using a Radical Beam During MBE Growth, K. Ohkawa et al., Journal of Crystal Growth III (1991).
Hishida Yuji
Yoshie Tomoyuki
Garrett Felisa
Sanyo Electric Co,. Ltd.
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